| 1. | Atoms of the film by dc reactive magnetron with pt sputtered tend to plane ordinal structure . molecules of the the film by sol - gel with pt sputtered tend to be surface center structure as wo6 . as results of ft - ir , the characteristic oscillation of the tungsten oxide sol - gel film with pdcl2 catalyst is more distinct with the higher temperature at the wave band
这两种方法结合制备的三氧化钨掺杂薄膜中溶胶掺铂样品综合了溶胶凝胶法与直流磁控溅射法的优点,其薄膜疏松多孔,充分快速响应了铂催化剂离化的氢,具有良好的氢敏性能,是制备氢气传感器薄膜的首选方法。 |
